DARPA: Microsystems Technology Office (MTO)

Microsystems Technology Office (MTO) has the below topic areas of interest:

Advanced Imaging Architectures and Systems
Chip Scale Sensors
Electro-Optical Infrared(EO/IR) Technologies
Emerging MEMS Technologies
Enabling component technology for cold-atom microsystems
Energy-Efficient Computing
Hardware Assurance, Reliability & Validation
Hardware for Advanced Signal Processing
Heterogeneous Integration
Low Power Electronics
Low Volume Microsystems Manufacturing
Microsystem Design & CAD
Microsystems for Directed Energy
Microsystems for Precision Navigation & Timing
Microsystems for RF/Optical Transceivers
Non-Silicon Electronics
Novel Photonic Devices
Photonic & Electronic Interconnects
Processing Techniques for Imaging and Spectral Recognition
Quantum Devices
Signal Processing to Reduce Hardware Requirements
Thermal Management
Other Microsystems Technology Topic Areas

http://www.grants.gov/web/grants/view-opportunity.html?oppId=264610